Microelectronics

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Microelectronics

With ever-increasing miniaturization and complexity, process requirements in microelectronics wet applications have become more and more stringent. A plethora of different media is necessary to cover the different processes in areas such as semiconductor manufacturing, photovoltaics, or LED. Ultrapure, safe, and reliable delivery of critical process media is of paramount importance.

Levitronix^® has been a key participant in the Microelectronics industry for over 20 years, providing ultrapure pump systems, mixers, and flow sensors that enable chip manufacturers globally to process smallest wafer structures.

Process Overview

APPLICATIONS

Microelectronics

Bulk Chemical Delivery

CMP Slurry Delivery

Cleaning

Plating

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Microelectronics Pumps

Ultrapure Bearingless Pump Systems

Microelectronics Pumps (Solvent Applications)

Anti-Static Bearingless Pump Systems

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Microelectronics Pumps (First Generation)

Ultrapure Bearingless Pump Systems

Microelectronics Flow Controllers

Ultrapure Bearingless Flow Controllers

Microelectronics Inline Flow Sensors

PFA Ultrasonic Inline Flow Sensors

Microelectronics Clamp-On Flow Sensors

Non-Invasive Ultrasonic Flow Sensors for PFA Tubing

Microelectronics Pump Tank Mixers

Simultaneous Mixing and Pumping

Pressure Boosting System

Turnkey Pressure Boosting and Control

Microelectronics Fans

Chemical Resistant Bearingless Fans

Downloads

Overview Brochure: Levitronix Pump Systems for Semiconductor Manufacturing

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