Levitronix® BPS First Generation
Ultrapure Bearingless Pumps
for Microelectronics
Wet Applications

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  • Microelectronics Pumps (First Generation)

The Levitronix® BPS First Generation pumps are designed for ultrapure processing of delicate fluids in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the magnetic field of the motor. The wide gap ensures that there is no mechanical contact between moving parts and therefore no wear. There are no bearings to wear out or seals to break down.
The impeller and casing are both made from chemical-resistant high purity fluoropolymer resins. Fluid flow rate and pressure are precisely controlled by electronically regulating the impeller speed.

Levitronix® BPS pumps offer distinctive advantages in microelectronic wet applications that will improve your product yield.
BPS Pump Systems
Benefits

The Purest Pump

Proven by industry experience - The purest pump within semiconductor manufacturing (and beyond)!

Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation.

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zoom graph-particle-size-distribution-measured-downstream-of-large-pump-systems-at-5gpm-and-40-psig
Particle size distribution measured downstream of large pump systems at 5gpm and 40 psig

Very Low Trace Metal Contamination

Significantly lower than air-operated pumps

The wet surface area of a Levitronix® pump is several times smaller than that of a pneumatic pump of comparable hydraulic power.

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zoom benefit-Graph-Trace-metal-extraction-of-three-Levitronix-pumps-compared-to-two-diaphragm-pumps
Trace metal extraction of three Levitronix pumps compared to two diaphragm pumps

Low Shear Design

Ideal for Slurry and delicate plating liquids

The absence of mechanical bearings, narrow gaps, fissures, and dead zones combined with the smooth wetted plastic surfaces allow for the gentle processing of sensitive liquids.

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zoom benefit-graph-effect-of-pumps-on-particles-≥-0.56-µm-linear-scales
Effect of pumps on particles ≥ 0.56 µm (linear scales)

Pulsation Free Flow

Improved filter performance

The open pump head design, high flow resolution, centrifugal pump principle, and the absence of valves lead to a pulsation-free flow, thereby improving the performance of ultrapure filters.

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zoom benefit-graph-retention-efficiency-as-a-function-of-pressure-pulsation
Retention efficiency as a function of pressure pulsation

No more flow throttling – highly accurate flow and pressure
The Levitronix® pump allows for precise control of flow or pressure over a wide operating range due to its variable speed and high resolution.

High Controllability and Wide Flow Range

Extremely high reliability
There are no bearings to wear out or seals to break down, increasing equipment uptime, extending the life of your process equipment, and reducing maintenance costs.

Highest MTBF (>100 years)

From a few mlpm up to max flow
BPS pumps accurately control and maintain a smooth flow from just a few mlpm up to the maximum flow rate, giving them the highest turndown ratio among competitive pumps.

Highest Turndown Ratio

Substantially smaller than air operated pumps
 The highly integrated design of the pump and motor combined with the absence of a mechanical bearing greatly reduce the footprint and allow for installation in confined spaces.

Small Footprint

More than 25 years experience
 Levitronix® pumps are firmly established in other highly demanding industries such as biopharmaceutical
production.

Long History

Smart Pumps for Smart Manufacturing
 BPS pumps allow for high-performance data acquisition that is ideal for predictive maintenance and factory wide system integration.

Constant Data Acquisition and Condition Monitoring

Substantially less noise than with pneumatic pumps
The magnetic coupling of the impeller and pump casing produces virtually no vibration resulting in an extremely quiet operation.

Low Noise and Low Vibration

Products
bps-200-pump

BPS-1

BPS-1

Max flow
21 lpm / 5.5 gpm
Max diff. pressure
1.6 bar / 23.2 psi
bps-3

BPS-3

BPS-3

Max flow
75 lpm / 20 gpm
Max diff. pressure
2.5 bar / 36.2 psi
bps-4

BPS-4

BPS-4

Max flow
140 lpm / 37 gpm
Max diff. pressure
4.2 bar / 61 psi
Flow Pressure Curves
Flow Pressure Curves
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