Levitronix® LFS
Ultrasonic High-Precision
Flow Measurement
for
Microelectronics
Wet Applications

The LEVIFLOW® LFS inline sensor is designed for non-invasive high precision flow measurements of high purity fluids. Two piezoelectric transducers generate and receive ultrasonic waves. When flow is present, the with-stream wave is accelerated, and the against-stream wave is slowed down. The difference in transit time is proportional to the velocity of the fluid. The wet material is made from PFA and resistant against harshest chemicals.

LEVIFLOW® inline sensors LFS offer distinctive advantages in microelectronic wet applications that will improve your product yield.
thumbnail-video-leviflow-lfs Leviflow LFS
Benefits

Non-invasive measurement
Since there are no moving parts, there is no wear and therefore virtually no particle generation.

Ideal for Ultrapure Fluids

High accuracy over wide flow range
1% accuracy of reading from a few mlpm to 80 lpm

High Precision Flow Measurement

Suitable for high volume applications
For high-volume applications, multi-channel converters are available, which can process up to 6 sensors with one single converter. The sensor signals are available over an RS485 two-wire bus or a PLC interface, thereby reducing cabling, footprint, and cost.

6-Channel Converter for Multiple Sensors

Up to 180° C/ 356° F liquid temperature
A high-temperature version with increased thermal insulation allows for an accurate flow measurement of hot liquids.

High-Temperature Sensor Available

Smart digital signal processing
The flow converter uses a digital signal processor (DSP) to provide accurate flow measurement even when bubbles are present.

Improved Robustness against Bubbles

Smart sensor
Various parameters such as full scale, total volume, bubble detection, or high flow alarm are provided and can be configured with the Levitronix Service Software.

Configurable Flow Sensor Parameters

Do you need
more info?