Levitronix® BPS Anti-Static
Ultrapure Bearingless Pumps
for Microelectronics
Wet Applications

The Levitronix® BPS anti-static pumps are designed for ultrapure processing of delicate solvents in microelectronic wet applications. Based on active magnetic levitation, the pump impeller is suspended and driven by the motor’s magnetic field. The wide gap ensures there is no mechanical contact between moving parts and, therefore, no wear. There are no bearings to wear out or seals to break down.  The conductive wet material is available in either stainless steel or PTFE with carbon fiber additives.

Levitronix® BPS Anti-Static offer distinctive advantages that will improve your product yield while providing execptional ESD protection.
BPS Anti-Static
Benefits

The Purest Pump

Proven by industry experience

Since there is no mechanical coupling between the impeller and the pump head casing, there is no wear and therefore virtually no particle generation.

Learn more
zoom graph-particle-size-distribution-measured-downstream-of-large-pump-systems-at-5gpm-and-40-psig
Particle size distribution measured downstream of large pump systems at 5gpm and 40 psig

Very Low Trace Metal Contamination

Significantly lower than air-operated pumps

The wet surface area of a Levitronix® pump is several times smaller than that of a pneumatic pump of comparable hydraulic power.

Learn more
zoom benefit-Graph-Trace-metal-extraction-of-three-Levitronix-pumps-compared-to-two-diaphragm-pumps
Trace metal extraction of three Levitronix pumps compared to two diaphragm pumps

Low Shear Design

Ideal for Slurry and delicate plating liquids

The absence of mechanical bearings, narrow gaps, fissures, and dead zones combined with the smooth wetted plastic surfaces allow for the gentle processing of sensitive liquids.

Learn more
zoom benefit-graph-effect-of-pumps-on-particles-≥-0.56-µm-linear-scales
Effect of pumps on particles ≥ 0.56 µm (linear scales)

Pulsation Free Flow

Improved filter performance

The open pump head design, high flow resolution, centrifugal pump principle, and the absence of valves lead to a pulsation-free flow, thereby improving the performance of ultrapure filters.

Learn more
zoom benefit-graph-retention-efficiency-as-a-function-of-pressure-pulsation
Retention efficiency as a function of pressure pulsation

No more flow throttling – highly accurate flow and pressure
The Levitronix® pump allows for precise control of flow or pressure over a wide operating range due to its variable speed and high resolution.

High Controllability and Wide Flow Range

Extremely high reliability
There are no bearings to wear out or seals to break down, increasing equipment uptime, extending the life of your process equipment, and reducing maintenance costs.

Highest MTBF (>100 years)

From a few mlpm up to max flow
BPS pumps accurately control and maintain a smooth flow from just a few mlpm up to the maximum flow rate, giving them the highest turndown ratio among competitive pumps.

Highest Turndown Ratio

Substantially smaller than air operated pumps
The highly integrated design of the pump and motor combined with the absence of a mechanical bearing greatly reduce the footprint and allow for installation in confined spaces.

Small Footprint

Smart Pumps for Smart Manufacturing
 BPS pumps allow for high-performance data acquisition that is ideal for predictive maintenance and factory wide system integration.

Constant Data Acquisition and Condition Monitoring

Substantially less noise than with pneumatic pumps
The magnetic coupling of the impeller and pump casing produces virtually no vibration resulting in an extremely quiet operation.

Low Noise and Low Vibration

Create a feedback loop
Integrate a flow or pressure sensor into your pump system and create a feedback loop to allow automatic control of your desired process conditions.

Integrated Flow Controller

More than 25 years experience
 Levitronix® pumps are firmly established in other highly demanding industries such as biopharmaceutical
production.

Long History

Flow Pressure Curves
Flow Pressure Curves
Do you need
more info?